Diamond crystal belongs to cubic crystal structure, in which the atoms are arranged with a high degree of symmetry. The diamond in from the ultraviolet to the infrared broad band have optical transmittance is high, it is a kind of excellent corrosion resistant material. Diamond film (Diamond films) with high thermal conductivity, wide band gap, high breakdown field, high carrier mobility and other advantages, it has the very important application prospect in high power, high temperature and high frequency field of semiconductor devices. Quality, orientation and growth rate with MPCVD method of diamond thin film synthesized are yet to be improved. (100) surface of CVD diamond film surface smooth, force, internal defects less low suitable for thermal, optical and electronic field.
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